Shallow trench isolation - Wikipedia
Removal rate vs . step height model for reverse tone etchback STI CMP. | Download Scientific Diagram
Impact of Nanotopography on STI CMP in Future Technologies D. Boning and B. Lee, MIT N. Poduje, ADE Corp. J. Valley, ADE Phase-Shift W. Baylies, Baytech. - ppt download
CMP Slurry ｜ Products ｜ AGC
Advanced Oxide CMP slurries: STI Selective Oxide CMP, HPD Selective Oxide CMP
Determination of process margin and global planarization characteristics in the direct STI-CMP process
Effects of STI-fill thickness on the CMP process defects - ScienceDirect
The effect of CeO2 abrasive size on dishing and step height reduction of silicon oxide film in STI–CMP - ScienceDirect
Chemical-mechanical polishing (CMP) process of STI and DTI- Ching-Yu Hsieh
Chemical Mechanical Polishing
JLPEA | Free Full-Text | Coverage Layout Design Rules and Insertion Utilities for CMP-Related Processes
Signal shape study from process control by interferometry for STI CMP
JLPEA | Free Full-Text | Coverage Layout Design Rules and Insertion Utilities for CMP-Related Processes
Impact of wafer transfer process on STI CMP scratches | Semantic Scholar
Figure 1 from Research and solution of STI CMP dishing and uniformity improve for 28LP | Semantic Scholar
Snapshot schematic of STI patterned wafer surface cross section during... | Download Scientific Diagram
